Thin-film deposition

From Wikinfo

Thin-film deposition is any technique for depositing (controlled deposition) of thin films of material unto a substrate (or unto previously deposited layers), especially in the manufacture of semiconductors and other electronic components.

Related terms: sputtering, vacuum deposition, vapor deposition, MEMs (microelectromechanical devices), nanotechnology

(see Materials science)

Additional work on this article is appreciated.

External Links

(A Google search on "thin film deposition" leads to 25,000 links, mostly for related equipment, textbooks, and university courses; very little of a tutorial or explanatory nature)

• University of Wisconsin: Laboratory for Thin Film Deposition
• Cambridge University Facilities
• Thin Film Deposition Processes and Techniques (A textbook summary and order form)
• ORNL (Oak Ridge National Laboratory)
• [1]

References

• Adapted from the Wikipedia article, "Thin-film_deposition" http://en.wikipedia.org/wiki/Thin-film_deposition, used under the GNU Free Documentation License